Development of Supercritical Nano Plating and the Application into Superfine Wiring

Journal of the Japan Society for Precision Engineering

Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289

Lecture

Development of Supercritical Nano Plating and the Application into Superfine Wiring

Masato SONE, Tetsuya SHIMIZU, Tso-Fu Mark CHANG

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Keywords: plating, supercritical fluid, carbon dioxide, integrated circuit wiring, copper, defect

JOURNAL FREE ACCESS

2012 Volume 78 Issue 12 Pages 1030-1033

DOI https://member-cnki-net-s-1416.res.gxlib.org.cn:443/rwt/1416/https/MSYXTLUQPJUB/10.2493/jjspe.78.1030

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© 2012 The Japan Society for Precision Engineering

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