Journal of the Japan Society for Precision Engineering

Volume 70, Issue 9

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[title in Japanese]

[in Japanese]

2004 Volume 70 Issue 9 Pages 1127
Published: September 05, 2004
Released on J-STAGE: April 10, 2009

DOIhttps://member-cnki-net-s-1416.res.gxlib.org.cn:443/rwt/1416/https/MSYXTLUQPJUB/10.2493/jjspe.70.1127

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Technical Trends of MEMS and Role of Design Tools

Hiroyuki FUJITA

2004 Volume 70 Issue 9 Pages 1133-1136
Published: September 05, 2004
Released on J-STAGE: April 10, 2009

DOIhttps://member-cnki-net-s-1416.res.gxlib.org.cn:443/rwt/1416/https/MSYXTLUQPJUB/10.2493/jjspe.70.1133

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Design and Fabrication of MEMS Packaging

Masayoshi ESASHI

2004 Volume 70 Issue 9 Pages 1137-1141
Published: September 05, 2004
Released on J-STAGE: April 10, 2009

DOIhttps://member-cnki-net-s-1416.res.gxlib.org.cn:443/rwt/1416/https/MSYXTLUQPJUB/10.2493/jjspe.70.1137

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Design and Fabrication of Optical MEMS

Hiroshi MIYAJIMA, Ryo OTA

2004 Volume 70 Issue 9 Pages 1142-1145
Published: September 05, 2004
Released on J-STAGE: April 10, 2009

DOIhttps://member-cnki-net-s-1416.res.gxlib.org.cn:443/rwt/1416/https/MSYXTLUQPJUB/10.2493/jjspe.70.1142

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Design an Fabrication of RF-MEMS Devices

Isaku KANNO, Hidetoshi KOTERA

2004 Volume 70 Issue 9 Pages 1146-1149
Published: September 05, 2004
Released on J-STAGE: April 10, 2009

DOIhttps://member-cnki-net-s-1416.res.gxlib.org.cn:443/rwt/1416/https/MSYXTLUQPJUB/10.2493/jjspe.70.1146

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Software Enhances MEMS R&D

A Knowledge Database Supporting Micro-Fabrication Developments

Kazuo SATO, Mitsuhiro SHIKIDA

2004 Volume 70 Issue 9 Pages 1150-1153
Published: September 05, 2004
Released on J-STAGE: April 10, 2009

DOIhttps://member-cnki-net-s-1416.res.gxlib.org.cn:443/rwt/1416/https/MSYXTLUQPJUB/10.2493/jjspe.70.1150

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Bulk Metallic Glasses as New Precision Engineering Materials

Akihisa INOUE

2004 Volume 70 Issue 9 Pages 1154-1158
Published: September 05, 2004
Released on J-STAGE: April 10, 2009

DOIhttps://member-cnki-net-s-1416.res.gxlib.org.cn:443/rwt/1416/https/MSYXTLUQPJUB/10.2493/jjspe.70.1154

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[title in Japanese]

2004 Volume 70 Issue 9 Pages 1159-1161
Published: September 05, 2004
Released on J-STAGE: April 10, 2009

DOIhttps://member-cnki-net-s-1416.res.gxlib.org.cn:443/rwt/1416/https/MSYXTLUQPJUB/10.2493/jjspe.70.1159

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