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Takeo OKI
1990 Volume 41 Issue 5 Pages
462-470
Published: May 01, 1990
Released on J-STAGE: October 30, 2009
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Yoichi MURAYAMA
1990 Volume 41 Issue 5 Pages
471-476
Published: May 01, 1990
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Laying Stress on CVD and Spray Coating
Kazuo AKASHI
1990 Volume 41 Issue 5 Pages
477-484
Published: May 01, 1990
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Akira KINBARA, Shigeru BABA
1990 Volume 41 Issue 5 Pages
485-489
Published: May 01, 1990
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Kohji HATTORI, Hiroshi MAEHARA
1990 Volume 41 Issue 5 Pages
490-494
Published: May 01, 1990
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Hiroshi IWANAGA
1990 Volume 41 Issue 5 Pages
495-501
Published: May 01, 1990
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Takashi MIZUGUCHI, Ensei KO, Tetsuya YOSHIKAWA, Kunihiko TSUJI
1990 Volume 41 Issue 5 Pages
509-513
Published: May 01, 1990
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Thin films of TiN, ZrN and HfN were deposited by the Arc Ion Plating process onto 18Cr-8Ni steel substrates at various values of
PN2 and substrates bias voltage (
Bv). Films were characterizated in terms of microhardness, critical load value (
Lc) as measured by scratch tester, surface roughness (
Ra), residual stress as measured by the sin
2φ method, and X-ray diffraction. Hv 2620 for TiN, 3010 for ZrN, 3840 for HfN was obtained at
PN2 of 10
-1 to a few Pa and
Bv of -50∼-100V. Residual stresses were predominant at a
PN2 of greater than 6.7×10
-2 Pa for TiN, and 6.7×10
-2 to 1.3Pa for ZrN, but
Bv had no effect on the (111) orientation. HfN films did not show the (111) orientation.
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Kazuyoshi SHIMAKAGE, Tadao SATO, Shigeo TODA, Tatsuya KIKUCHI
1990 Volume 41 Issue 5 Pages
514-518
Published: May 01, 1990
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Zirconium boride (ZrB
2) thin film has been synthesized on an aluminum substrate by reactive ion plating methods. The following four processes were applied to the synthesis of ZrB
2 thin film. (1) Metallic zirconium and BCl
3 gas were vaporized on an aluminum substrate by reactive ion plating. (2) A mixture of metallic zirconium and elemental boron was simultaneously deposited on an aluminum plate by ion plating. (3) ZrB
2 thin film was prepared with a heating treatment of the multi-layer product after an alternating vaporization using metallic zirconium and elemental boron. (4) Metallic zirconium and B
2H
6 gas were vaporized on an aluminum plate by reactive ion plating.
In these processes, it was found to be difficult to synthesize ZrB
2 thin film in terms of the processes from (1) to (3). The process (4) using metallic zirconium and B
2H
6 gas as a source of boron was found to be more effective for the preparation of ZrB
2 thin film when the synthesis was carried out under optimum conditions of a substrate temperature of 410K and a bell-jar pressure of 0.3Pa.
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Dongdong WANG, Takeo OKI
1990 Volume 41 Issue 5 Pages
519-523
Published: May 01, 1990
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The properties of Cr-N films deposited by reactive ion plating were found to depend on the preparation conditions. Cr+Cr
2N films exhibited a fine granular structure and showed better corrosion resistance, and higher Vickers microhardness than ion-plated Cr film. Wear resistance, however, was not as good. Cr
2N film was very hard and had good corrosion resistance, but its wear resistance was not satisfactory. CrN films that were deposited at 0.5∼1kV bias voltage and high ionization current showed a strong (200) crystal orientation and exhibited a fine columnar structure. These films were very hard, and had both good wear resistance and corrosion resistance, but too high a bias voltage will have an adverse influence on film properties.
This shows that the properties of the film can be changed by controling its composition, crystal orientation and morphology.
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Keiko KUROKAWA, Takashi ODAIRA, Yoshinori NAKAYAMA, Kikuo TAKIZAWA, Ha ...
1990 Volume 41 Issue 5 Pages
524-529
Published: May 01, 1990
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TiN films were variously deposited onto SUS 304 stainless steel by an ion plating process using hollow cothode discharge (HCD). The pitting and crevice corrosion resistance of the TiN-coated specimens was estimated in chloride solutions, mainly by the electro-chemical method. The results obtained are as follows; The effects on corrosion resisitance of a TiC coating under the TiN film and of the temperatuer of deposition were not clear, but the effect of a Ti undercoating was evident. Corrosion morphology was also affected by Ti undercoating.
In specimens without Ti undercoating, the pitting and crevice corrosion resistance was decreased by TiN coating, whereas with Ti undercoating the pitting potential and starting potential to crevice corrosion became more noble. Accordingly the pitting and crevice corrosion resistance was improved by TiN coating, but the repassivation potential became less nobel and repassivation was restrained as corrosion started.
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Matsufumi TAKAYA, Masahisa MATSUNAGA
1990 Volume 41 Issue 5 Pages
530-533
Published: May 01, 1990
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(Ti, Al)N films having various composition ratios of Ti and Al were deposited onto a hard alloy substrate by reactive RF sputtering using a single power source, the power from which was split by a variable coupling capacitor. A series of (Ti, Al)N specimens was obtained by changing voltage in a mixed argon-nitrogen atmosphere.
Film composition were measured by X-ray diffraction and EPMA.
The results showed that all the (Ti, Al)N films showed homogenous distribution of Ti and Al. X-ray patterns showed obvious formation of TiN for concentrated Ti side and AlN formation for Al riched side.
Those (Ti, Al)N films having Ti-to-Al ratios approximating 1 1 were amorphous. Hardness of the films was from Hv1200 to Hv1300.
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Manabu TAKEUCHI, Kazuo MIWADA, Hideo NAGASAKA
1990 Volume 41 Issue 5 Pages
534-537
Published: May 01, 1990
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RuO
2-SiO
2 films about 0.3-0.4μm thick were prepared from a RuO
2-SiO
2 composite target by RF sputtering in an argon atmosphere, and their crystal structure and electrical properties were investigated. The crystallinity of the sputtered RuO
2-SiO
2 films was found to depend on the volume fraction,
x, of SiO
2 and on the sputtering power density. Film crystallinity decreased with an increase in
x and with a decrease in sputtering power density. The electrical resistivity of the sputtered RuO
2-SiO
2 films varied with
x over a wide range and was divided into three regions: low (
x<0.4), transitional (0.4<
x<0.6) and high (
x>0.6). The temperature dependence of resistivity was also measured for specimens in the low resistivity region. It was found that the TCR of films prepared at low power densities was negative, while for films prepared at high power densities TCR was positive. These results can be explained by a model in which the sputtered RuO
2-SiO
2 films consist of micro-crystalline RuO
2 grains, amorphous RuO
2 and amorphous SiO
2. The amorphous RuO
2 is considered to have a negative TCR.
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Eiki TAKESHIMA, Kaoru GONOI, Takahiro FUJII, Akira SAKAKURA
1990 Volume 41 Issue 5 Pages
538-544
Published: May 01, 1990
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A particle sputter-coating apparatus that uses a rotational barrel chamber of a special structure is described, along with the technique whereby this apparatus is used with another particle electroplating apparatus developed by the authors to coat Al
2O
3 particles with titanium and then with copper. These double-coated particles are then molded and sintered in the liquid phase, yielding an elaborate composite material in which Al
2O
3 is dispersed homogeneously. This copper-based Al
2O
3 particle-reinforced composite material (PRCM) has the following characteristics: 1) Adhesive bonding strength between copper and Al
2O
3 is high. 2) The number of remaining pores is minimized and Vickers hardness is very high. This particle coating technique makes it possible to create various kinds of composite materials, and has recently attracted considerable attention as a key technology for new functional composite materials.
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Hiroyuki SUGIMURA
1990 Volume 41 Issue 5 Pages
545-548
Published: May 01, 1990
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Amorphous carbon films were deposited by RF plasma CVD using methane source gas. The optical bandgaps of the films as measured by transmission spectroscopy varied from 1.0 to 1.8eV depending on CVD conditions. The complex refractive indices
n-ik of the films were also investigated, and were found to vary from 1.6 to 2.0. The films were almost transparent to near infrared light, but showed strong absorption in the visible spectrum range. The optical properties of the films changed when oxygen and hydrogen were added to the source gas. The extinction coefficient
k increased with the addition of oxygen and decreased with addition of hydrogen, but there was little change in refractive index
n.
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Tadao SATO, Utaro NISHINO, Shunji MIYAKAWA, Kazuyoshi SHIMAKAGE
1990 Volume 41 Issue 5 Pages
549-554
Published: May 01, 1990
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Chemical vapor deposition of ZrB
2 and TiB
2-ZrB
2 composites on mild steel substrates was carried out with the hydorgen reduction of ZrCl
4-BCl
3 and TiCl
4-ZrCl
4-BCl
3 mixtures.
The ZrB
2 deposition was carried out at substrate temperatures of 1273K and above, [ZrCl
4/ZrCl
4+BCl
3] gas ratios of 0.33 and above, and Cl/H ratios of 0.13 and below. The deposition of FeB was observed without these conditions.
TiB
2-ZrB
2 composite film was formed at 1273K, and its phase was determined by X-ray diffraction to be ZrB
2 within the range of film compositions equivalent to 0-77mol% TiB
2. TiB
2 phase was identified in compositions of 89mol% TiB
2 and above. The lattice constant of the composite film gradually decraesed with an increase in the titanium content of the film, and its sudden drop was observed at the boundary composition of TiB
2 and ZrB
2 phases.
A maximum micro-vickers hardness of about 4600kg·f/mm
2 was measured for composite films having the composition of TiB
2/ZrB
2=1 in molar ratio.
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Chia-Fu CHEN, Ensei KO, Kazuhito NISHIMURA, Satoru HOSOMI
1990 Volume 41 Issue 5 Pages
555-559
Published: May 01, 1990
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An tentative evaluation was made by cathodoluminescence for diamond films deposited by microwave plasma CVD.
The diamond was prepared from source gases of either H
2+CH
4 or H
2+CO. Results obtained by CL analysis were compared with those by XRD, Raman spectroscopy and SE microscopy, and CL turned out to be a very effective technique for evaluating crystallinity of diamonds-both CVD-deposited and natural.
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Keiichi TERASHIMA, Kikuo MATSUSAKA, Tomoya MINEGISHI
1990 Volume 41 Issue 5 Pages
560-565
Published: May 01, 1990
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Non-mass analyzed nitrogen ions were implanted at dose of from 1×10
17ions cm
-2 to 1×10
18ions cm
-2 into sheets of group-VIa transition metals (Ti, Zr, Hf) and at room temperature using a Zymet implanter model Z-100 at an accelerating voltage of 90keV. Nitride formation in Ti, Zr and Hf was verifed by X-ray thin-film diffraction (TFD), and the distribution of nitrogen and oxygen was determined by glow discharge spectrometry (GDS) or Auger electron spectroscopy (AES). Reflectance and color were also determined.
Ti
2N, TiN, ZrN, HfN and Hf
4N
3 phases were observed depending on the implantation dose. Depth profiles suggest that the surface thin layer consisits of a multilayer (oxide/nitride/metal) structure containing oxides.
The color of nitrogen-implanted Zr and Hf varied from yellow to reddish yellow with the level of nitrogen content. The reflectance minimum shifted to lower photon energy with increased nitrogen content. This behavior is attributed to the combined effect of the surface structure and the concentration of implanted nitrogen.
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Ryouichi URAO, Seizou KITAGAWA, Kazunari NAKAGAWA, Takashi INAMI, Masa ...
1990 Volume 41 Issue 5 Pages
566-569
Published: May 01, 1990
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In order to investigate the influence of alloying elements, low-carbon alloy steels containing Mo, Nb, V and Cr were ion-nitrided at 823K for 2 and 4h in a 50%N
2-50%H
2 gas mixture at 800Pa. Samples of the ion-nirtided low-carbon alloy steels were subjected to hardness test, microscopic examination and X-ray diffraction analysis. The following conclusions were reached. Ion-nitriding produced a markedly hardened surface layer on samples containig, Nb, V ans Cr. There was little increase in hardness in samples containing Mo and samples of plain low-carbon steel. Sectional hardness distributions of the nitrided steels showed characteristic shapes attributable to the alloyig elements in the steels. Vanadium and niobium steels showed, respectively, 2 and 3 plateaus in thier hardness distribution curves. A white layer of ε-Fe
2-3N nitride was formed on the surface of nitrided samples, and characteristic nitriding layer was formed beneath that nitride layer. The large increase in the hardness of the nitriding layer is attributed to precipitation of the very fine alloy nitrides accompanying the very high levels of precipitation strain.
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Akira ISHIDA, Atsushi TAKEI
1990 Volume 41 Issue 5 Pages
570-571
Published: May 01, 1990
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Shigeki OGURA, Shinei MINETA, Nobuo YASUNAGA
1990 Volume 41 Issue 5 Pages
572-573
Published: May 01, 1990
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Matsufumi TAKAYA, Tsuyoshi MIURA, Yukihiro SAKAMOTO
1990 Volume 41 Issue 5 Pages
574-575
Published: May 01, 1990
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Keiichi TERASHIMA, Kikuo MATSUSAKA, Tomoya MINEGISHI
1990 Volume 41 Issue 5 Pages
576-577
Published: May 01, 1990
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Hiroshi IWANAGA, Takeshi IWASAKI, Seiji MOTOJIMA
1990 Volume 41 Issue 5 Pages
578-579
Published: May 01, 1990
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